US 11,673,165 B2
Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
Michael Daneman, Campbell, CA (US)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Feb. 3, 2017, as Appl. No. 15/424,703.
Claims priority of provisional application 62/334,413, filed on May 10, 2016.
Prior Publication US 2017/0326590 A1, Nov. 16, 2017
This patent is subject to a terminal disclaimer.
Int. Cl. B06B 1/06 (2006.01); H01L 41/18 (2006.01); H10N 30/85 (2023.01); H10N 30/87 (2023.01); H10N 30/00 (2023.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01)
CPC B06B 1/0603 (2013.01) [B06B 1/06 (2013.01); B06B 1/0622 (2013.01); B06B 1/0648 (2013.01); B06B 1/0651 (2013.01); H10N 30/1051 (2023.02); H10N 30/85 (2023.02); H10N 30/875 (2023.02)] 25 Claims
OG exemplary drawing
 
1. A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device comprising:
a substrate comprising a CMOS logic wafer;
an edge support structure connected to the substrate;
a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
a piezoelectric layer, and
first and second electrodes coupled to opposing sides of the piezoelectric layer;
wherein the PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode.