CPC B06B 1/0603 (2013.01) [B06B 1/06 (2013.01); B06B 1/0622 (2013.01); B06B 1/0648 (2013.01); B06B 1/0651 (2013.01); H10N 30/1051 (2023.02); H10N 30/85 (2023.02); H10N 30/875 (2023.02)] | 25 Claims |
1. A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device comprising:
a substrate comprising a CMOS logic wafer;
an edge support structure connected to the substrate;
a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
a piezoelectric layer, and
first and second electrodes coupled to opposing sides of the piezoelectric layer;
wherein the PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode.
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