US 11,672,161 B2
Method of manufacturing display apparatus
Geunwoo Yug, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Dec. 5, 2019, as Appl. No. 16/704,732.
Claims priority of application No. 10-2018-0168716 (KR), filed on Dec. 24, 2018.
Prior Publication US 2020/0203671 A1, Jun. 25, 2020
Int. Cl. B23K 26/082 (2014.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01); H01L 51/00 (2006.01); B23K 26/384 (2014.01); H01L 51/52 (2006.01)
CPC H01L 51/56 (2013.01) [B23K 26/082 (2015.10); B23K 26/384 (2015.10); H01L 27/3244 (2013.01); H01L 51/0096 (2013.01); H01L 51/5253 (2013.01); H01L 2227/323 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a display apparatus, the method comprising:
forming a plurality of display devices in a display area of a substrate including an opening area, the display area surrounding the opening area; and
forming an opening in the opening area,
wherein the forming of the opening comprises:
performing a first scan operation, whereby a laser beam is irradiated onto an edge of the opening area and the laser beam is moved during irradiation in a direction of the substrate along a plurality of first unit paths having a radius smaller than a radius of the opening, wherein the first scanning operation is completed by traveling around overlapping ones of the first unit paths at the edge of the opening area; and
performing a second scan operation, whereby the laser beam is irradiated onto the edge of the opening area and the laser beam is moved during irradiation in the direction of the substrate along a plurality of second unit paths that are different from the plurality of first unit paths, wherein the second scanning operation is completed by traveling around overlapping ones of the second unit paths at the same edge of the opening area after the completion of the first scanning operation.