CPC H01L 27/11582 (2013.01) | 17 Claims |
1. An electronic device comprising:
a cell region comprising stacks of alternating dielectric materials and conductive materials;
a pillar region adjacent to the cell region, the pillar region comprising storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region, the storage node segments vertically separated only by a lateral extension of the tunnel region; and
a high-k dielectric material adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region.
|