US 11,671,776 B2
Microphone test module and a method of testing microphones
Anton Schuster, Grassau (DE)
Assigned to Cohu GmbH, Kolbermoor (DE)
Filed by Cohu GmbH, Kolbermoor (DE)
Filed on May 13, 2021, as Appl. No. 17/319,626.
Claims priority of application No. 102020113165.8 (DE), filed on May 14, 2020.
Prior Publication US 2021/0360360 A1, Nov. 18, 2021
Int. Cl. H04R 29/00 (2006.01)
CPC H04R 29/004 (2013.01) 14 Claims
OG exemplary drawing
 
1. A microphone test module for testing a microphone in the area of semiconductor testing comprises:
an outer chamber being airtight, and
a sound chamber comprising an electrical test device for testing the microphone,
wherein the electrical test device comprises a test socket for semiconductor testing arranged within the sound chamber and configured to apply test signals to the microphone and to transmit data and the test signals to a tester being located outside of the outer chamber,
wherein the sound chamber is located within the outer chamber, and wherein the sound chamber is coupled to the outer chamber with a connection suppressing structure-borne noise between the outer chamber and the sound chamber, wherein a space between the outer chamber and the sound chamber has a gas pressure being lower than an ambient air pressure,
wherein the sound chamber comprises a first sound chamber half and a second sound chamber half,
wherein the first sound chamber half and the second sound chamber half provide a sound chamber opening to receive the microphone to be tested, and
wherein the first sound chamber half and the second sound chamber half provide an electrical connection between the microphone to be tested and the test device,
a first mating actuator being mounted between the first sound chamber half and the second sound chamber half for providing a mating movement in open position and a closed position so that the sound chamber is formed and being airtight by mating the first sound chamber half and the second sound chamber half together.