US 11,671,045 B2
Transport apparatus and control method
Hiromu Sekiguchi, Kanagawa (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 23, 2021, as Appl. No. 17/384,492.
Claims priority of application No. JP2020-129551 (JP), filed on Jul. 30, 2020.
Prior Publication US 2022/0038039 A1, Feb. 3, 2022
Int. Cl. H02P 7/00 (2016.01); H02P 21/22 (2016.01); G01R 31/389 (2019.01); B65G 43/08 (2006.01)
CPC H02P 21/22 (2016.02) [B65G 43/08 (2013.01); G01R 31/389 (2019.01)] 23 Claims
OG exemplary drawing
 
1. A transport apparatus comprising:
a plurality of coils arranged in a predetermined direction;
moved that is movable in the predetermined direction; and
a control device configured to apply a current to each of the plurality of coils to move the mover in the predetermined direction,
wherein the control device is configured to apply, to each of the plurality of coils, the current including a first component applying a thrust to the mover and a second component measuring an impedance of at least one of the plurality of coils, and
wherein a thrust applied to the mover by the second component is less than the thrust applied to the mover by the first component.