US 11,670,998 B2
Conveyance apparatus and method of manufacturing article
Tomohiro Ono, Kanagawa (JP); Hitoshi Suzuki, Chiba (JP); and Takeshi Yamamoto, Kanagawa (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Feb. 3, 2021, as Appl. No. 17/166,634.
Claims priority of application No. JP2020-019513 (JP), filed on Feb. 7, 2020.
Prior Publication US 2021/0249944 A1, Aug. 12, 2021
Int. Cl. H02K 41/03 (2006.01); B65G 23/23 (2006.01)
CPC H02K 41/031 (2013.01) [B65G 23/23 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A conveyance apparatus comprising:
a stator including a plurality of coils arranged along a first direction; and
a mover configured to move along the first direction and including a plurality of magnet groups arranged in a row along the first direction,
wherein the plurality of magnet groups has a first magnet group that includes a plurality of first magnets arranged to alternate polarities along the first direction, and a second magnet group that includes a plurality of second magnets arranged to alternate polarities along a second direction intersecting with the first direction,
wherein at least one of the plurality of coils includes a core, a wire-wound portion wound around the core, and a yoke, and
wherein the yoke is adjacent to an outer periphery of the wire-wound portion in the second direction.