US 11,670,911 B2
Light emitting device and method of manufacturing same, and projector
Michifumi Nagawa, Matsumoto (JP); and Shunsuke Ishizawa, Shinjuku (JP)
Assigned to SEIKO EPSON CORPORATION
Appl. No. 16/758,920
Filed by Seiko Epson Corporation, Tokyo (JP)
PCT Filed Oct. 19, 2018, PCT No. PCT/JP2018/039049
§ 371(c)(1), (2) Date Apr. 24, 2020,
PCT Pub. No. WO2019/082817, PCT Pub. Date May 2, 2019.
Claims priority of application No. JP2017-208551 (JP), filed on Oct. 27, 2017.
Prior Publication US 2020/0266611 A1, Aug. 20, 2020
Int. Cl. H01S 5/00 (2006.01); H01S 5/20 (2006.01); H01S 5/042 (2006.01); H01S 5/32 (2006.01); G03B 21/20 (2006.01); H01S 5/343 (2006.01); H01S 5/028 (2006.01)
CPC H01S 5/2018 (2013.01) [H01S 5/04256 (2019.08); H01S 5/209 (2013.01); H01S 5/3211 (2013.01); G03B 21/2033 (2013.01); H01S 5/0281 (2013.01); H01S 5/04254 (2019.08); H01S 5/04257 (2019.08); H01S 5/34333 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A light emitting device comprising:
a substrate;
a laminated structure provided to the substrate;
a plurality of recessed parts disposed at an opposite side of the laminated structure with respect to the substrate; and
an electrode disposed at the opposite side of the laminated structure,
wherein the laminated structure includes a plurality of columnar parts, each of the plurality of columnar parts includes:
a first semiconductor layer,
a second semiconductor layer different in conductivity type from the first semiconductor layer; and
an active layer disposed between the first semiconductor layer and the second semiconductor layer,
the first semiconductor layer is disposed between the substrate and the active layer,
each of the plurality recessed parts is provided with a low refractive-index part lower in refractive index than the second semiconductor layer,
a depth of each of the plurality of recessed parts is no larger than a distance between a surface at the opposite side of the laminated structure and the active layer,
the plurality of the recessed parts is arranged in a predetermined direction at a first pitch,
the plurality of columnar parts is arranged in the predetermined direction at a second pitch, and
the first pitch is smaller than the second pitch.