CPC H01L 31/1075 (2013.01) [G01N 21/75 (2013.01); H01L 27/14643 (2013.01); H01L 31/18 (2013.01)] | 19 Claims |
1. A method for manufacturing a device for detecting a chemical species, comprising:
forming a Geiger-mode avalanche diode in a body of semiconductor material delimited by a front surface, wherein forming the Geiger-mode avalanche diode includes:
forming a cathode region having a first type of conductivity in the body and extending from the front surface; and
forming an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface;
forming, on the anode region, a sensitive structure that includes a sensitive region, said sensitive region having an electrical permittivity that depends upon a concentration of said chemical species, a portion of the sensitive region directly overlying the anode region; and
forming, on the sensitive structure, a resistive region electrically coupled to the anode region.
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