CPC H01L 31/077 (2013.01) [H01L 31/02363 (2013.01); H01L 31/022466 (2013.01); H01L 31/03685 (2013.01); H01L 31/075 (2013.01); H01L 31/076 (2013.01); H01L 31/1824 (2013.01); H01L 31/1884 (2013.01)] | 8 Claims |
1. A heterojunction solar cell apparatus comprising:
a substrate,
a p-i-n structure disposed on the substrate, the structure comprising
a heterojunction p-type amorphous layer arranged on
a heterojunction first i-type amorphous layer arranged on
a heterojunction first n-type crystalline layer arranged on
a heterojunction second i-type amorphous layer arranged on
a heterojunction second n-type crystalline layer,
wherein the heterojunction second n-type layer comprises an oxygen-rich amorphous silicon phase, comprising heterojunction n-type donors including phosphorus atoms, wherein the heterojunction n-type donors comprise oxygen atoms at an atomic concentration comprised between 5% and 25% of the overall atomic composition of the n-type layer, and wherein the heterojunction n-type donors comprise phosphorus atoms at an atomic concentration between 1% and 4% of the overall atomic composition of the heterojunction n-type layer.
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