US 11,670,729 B2
Solar cell apparatus and method for forming the same for single, tandem and heterojunction systems
Anna Battaglia, Catania (IT); Cosimo Gerardi, Catania (IT); Giuseppe Condorelli, Catania (IT); and Andrea Canino, Catania (IT)
Assigned to Sun S.R.L., Catania (IT)
Appl. No. 16/478,847
Filed by 3Sun S.r.l., Catania (IT)
PCT Filed Jan. 17, 2018, PCT No. PCT/EP2018/051131
§ 371(c)(1), (2) Date Jul. 18, 2019,
PCT Pub. No. WO2018/134269, PCT Pub. Date Jul. 26, 2018.
Claims priority of application No. 102017000004876 (IT), filed on Jan. 18, 2017.
Prior Publication US 2021/0296522 A1, Sep. 23, 2021
Int. Cl. H01L 31/077 (2012.01); H01L 31/0224 (2006.01); H01L 31/0236 (2006.01); H01L 31/0368 (2006.01); H01L 31/075 (2012.01); H01L 31/076 (2012.01); H01L 31/18 (2006.01)
CPC H01L 31/077 (2013.01) [H01L 31/02363 (2013.01); H01L 31/022466 (2013.01); H01L 31/03685 (2013.01); H01L 31/075 (2013.01); H01L 31/076 (2013.01); H01L 31/1824 (2013.01); H01L 31/1884 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A heterojunction solar cell apparatus comprising:
a substrate,
a p-i-n structure disposed on the substrate, the structure comprising
a heterojunction p-type amorphous layer arranged on
a heterojunction first i-type amorphous layer arranged on
a heterojunction first n-type crystalline layer arranged on
a heterojunction second i-type amorphous layer arranged on
a heterojunction second n-type crystalline layer,
wherein the heterojunction second n-type layer comprises an oxygen-rich amorphous silicon phase, comprising heterojunction n-type donors including phosphorus atoms, wherein the heterojunction n-type donors comprise oxygen atoms at an atomic concentration comprised between 5% and 25% of the overall atomic composition of the n-type layer, and wherein the heterojunction n-type donors comprise phosphorus atoms at an atomic concentration between 1% and 4% of the overall atomic composition of the heterojunction n-type layer.