US 11,670,657 B2
Image sensor including fence structure disposed laterally of color filters
Min Hwan Jeon, Hwaseong-si (KR); Doo Won Kwon, Seongnam-si (KR); Chan Ho Park, Hwaseong-si (KR); Kyung Rae Byun, Seoul (KR); Dong-Chul Lee, Hwaseong-si (KR); and Chong Kwang Chang, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Aug. 26, 2020, as Appl. No. 17/3,224.
Claims priority of application No. 10-2019-0131874 (KR), filed on Oct. 23, 2019.
Prior Publication US 2021/0126028 A1, Apr. 29, 2021
Int. Cl. H01L 27/146 (2006.01); H04N 23/10 (2023.01)
CPC H01L 27/14621 (2013.01) [H01L 27/1463 (2013.01); H01L 27/14603 (2013.01); H01L 27/14609 (2013.01); H01L 27/14627 (2013.01); H01L 27/14643 (2013.01); H01L 27/14685 (2013.01); H04N 23/10 (2023.01)] 18 Claims
OG exemplary drawing
 
1. An image sensor comprising:
a photoelectric conversion element disposed in a substrate;
a fence structure disposed on the substrate and including a low refractive index layer stacked on a barrier layer, wherein the barrier layer includes at least one metal; and
a color filter disposed inwardly lateral with respect to a sidewall of the fence structure,
wherein the barrier layer includes an outward lateral stepped recess that underlays at least a portion of the fence structure.