US 11,670,649 B2
Sensor chip and electronic device
Shinichiro Yagi, Kanagawa (JP); Yusuke Otake, Kanagawa (JP); and Kyosuke Ito, Kanagawa (JP)
Assigned to SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
Appl. No. 17/600,674
Filed by SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
PCT Filed Mar. 16, 2020, PCT No. PCT/JP2020/011368
§ 371(c)(1), (2) Date Oct. 1, 2021,
PCT Pub. No. WO2020/209009, PCT Pub. Date Oct. 15, 2020.
Claims priority of application No. JP2019-073485 (JP), filed on Apr. 8, 2019.
Prior Publication US 2022/0181366 A1, Jun. 9, 2022
Int. Cl. H01L 27/14 (2006.01); H01L 27/146 (2006.01); G01S 17/894 (2020.01); G01S 7/4863 (2020.01); H04N 25/79 (2023.01); H04N 25/702 (2023.01)
CPC H01L 27/14605 (2013.01) [G01S 7/4863 (2013.01); G01S 17/894 (2020.01); H01L 27/1463 (2013.01); H01L 27/14629 (2013.01); H01L 27/14634 (2013.01); H01L 27/14636 (2013.01); H01L 27/14665 (2013.01); H04N 25/702 (2023.01); H04N 25/79 (2023.01)] 6 Claims
OG exemplary drawing
 
1. A sensor chip, comprising:
a pixel array section including a pixel area in which a plurality of pixels is arranged in rows and columns;
an avalanche photodiode element that amplifies a carrier by a high electric field area provided for the each of the pixels;
an inter-pixel separation section that insulates and separates the each of the pixels from another pixel adjacent to the each of the pixels in a semiconductor substrate in which the avalanche photodiode element is formed; and
a wiring that is arranged in a wiring layer laminated on a surface being opposite to a light receiving surface of the semiconductor substrate in such a way as to cover at least the high electric field area,
wherein the pixel array section includes a dummy pixel area located near a peripheral edge of the pixel area, and
a cathode electric potential and an anode electric potential of the avalanche photodiode element that is arranged in the dummy pixel area are a same electric potential, or at least one of the cathode electric potential and the anode electric potential is in a floating state.