US 11,670,529 B2
Substrate processing device and component inspection method for substrate processing device
Akio Hashizume, Kyoto (JP)
Assigned to SCREEN HOLDINGS CO., LTD., Kyoto (JP)
Appl. No. 16/634,190
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
PCT Filed May 15, 2018, PCT No. PCT/JP2018/018812
§ 371(c)(1), (2) Date Jan. 27, 2020,
PCT Pub. No. WO2019/021584, PCT Pub. Date Jan. 31, 2019.
Claims priority of application No. JP2017-146459 (JP), filed on Jul. 28, 2017.
Prior Publication US 2020/0234985 A1, Jul. 23, 2020
Int. Cl. H01L 21/67 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67288 (2013.01) [H01L 21/67023 (2013.01); H01L 22/26 (2013.01)] 14 Claims
 
1. A substrate processing device that performs substrate processing with a processing solution, the substrate processing device comprising an inspection unit that inspects degradation of components constituting the substrate processing device, the components including at least one inspection target component,
the at least one inspection target component is made of a conductive material containing carbon or has a resin coating layer formed on a surface,
wherein the inspection unit includes:
a capturing unit that acquires image data that includes the at least one inspection target component;
a color information acquisition unit that acquires color information of the at least one inspection target component from the image data acquired by the capturing unit; and
a degradation determination unit that determines a degree of discoloration due to degradation of the at least one inspection target component that is degraded by contact with the processing solution, based on the acquired color information, wherein the conductive material contains at least any of a tetrafluoroethylene/ethylene copolymer, a carbon fiber-containing tetrafluoroethylene/perfluoroalkyl vinyl ether copolymer, carbon nanotube-containing polychlorotrifluoroethylene, and carbon nanotube-containing polytetrafluoroethylene.