US 11,670,488 B2
Fast arc detecting match network
Stephen E. Savas, San Jose, CA (US); and Alexandre De Chambrier, San Jose, CA (US)
Assigned to COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed by COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed on Jan. 8, 2021, as Appl. No. 17/145,228.
Claims priority of provisional application 62/959,650, filed on Jan. 10, 2020.
Prior Publication US 2021/0217590 A1, Jul. 15, 2021
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32944 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An automated impedance matching network for controlling a radio frequency power generator comprising:
a radio frequency isolated compartment in the automated impedance matching network having a plurality of signal input ports and a plurality of broadband radio frequency detectors, each signal input port connected to a different broadband radio frequency detector, wherein each of the plurality of broadband radio frequency detectors comprise a circuit configured to analyze signals according to frequency, and each of the plurality of broadband radio frequency detectors may be connected externally to, and receive signals from, a broadband radio frequency sensor associated with a reaction chamber;
a computation and logic processor connected to a plurality of outputs of the plurality of broadband radio frequency signal detectors, the computation and logic processor programmed to determine differences between an amplitude and a phase of each frequency component; and
an output from the computation and logic processor configured to provide input data to at least one of a radio frequency generator and a processing controller for the reaction chamber.