CPC H01J 37/32183 (2013.01) [H01J 37/32944 (2013.01)] | 20 Claims |
1. An automated impedance matching network for controlling a radio frequency power generator comprising:
a radio frequency isolated compartment in the automated impedance matching network having a plurality of signal input ports and a plurality of broadband radio frequency detectors, each signal input port connected to a different broadband radio frequency detector, wherein each of the plurality of broadband radio frequency detectors comprise a circuit configured to analyze signals according to frequency, and each of the plurality of broadband radio frequency detectors may be connected externally to, and receive signals from, a broadband radio frequency sensor associated with a reaction chamber;
a computation and logic processor connected to a plurality of outputs of the plurality of broadband radio frequency signal detectors, the computation and logic processor programmed to determine differences between an amplitude and a phase of each frequency component; and
an output from the computation and logic processor configured to provide input data to at least one of a radio frequency generator and a processing controller for the reaction chamber.
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