US 11,670,481 B2
Charged particle beam device
Motonobu Hommi, Tokyo (JP); Satoru Yamaguchi, Tokyo (JP); Kei Sakai, Tokyo (JP); and Hiroshi Nishihama, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Sep. 29, 2021, as Appl. No. 17/449,286.
Claims priority of application No. JP2020-195611 (JP), filed on Nov. 26, 2020.
Prior Publication US 2022/0165537 A1, May 26, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2817 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a microscope that scans a charged particle beam on a sample, detects secondary particles emitted from the sample, and outputs a detection signal;
a computer system that generates a first frame image based on the detection signal and performs an image process based on the first frame image, wherein the computer system calculates a moment image between a plurality of frame images including the first frame image and calculates a feature amount data of the first frame image based on the moment image, and the computer system generates a plurality of simulation images having different white noises by using a plurality of random number images according to a distribution of standard deviation images and by using the feature amount data.