CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2817 (2013.01)] | 14 Claims |
1. A charged particle beam device comprising:
a microscope that scans a charged particle beam on a sample, detects secondary particles emitted from the sample, and outputs a detection signal;
a computer system that generates a first frame image based on the detection signal and performs an image process based on the first frame image, wherein the computer system calculates a moment image between a plurality of frame images including the first frame image and calculates a feature amount data of the first frame image based on the moment image, and the computer system generates a plurality of simulation images having different white noises by using a plurality of random number images according to a distribution of standard deviation images and by using the feature amount data.
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