US 11,669,111 B2
Valve assembly and system used to control flow rate of a fluid
Mohamed Saleem, Freemont, CA (US); Arun Nagarajan, Freemont, CA (US); Daniel Mudd, Freemont, CA (US); and Hossein Ghapanchizadeh, Freemont, CA (US)
Assigned to Illinois Tool Works Inc., Glenview, IL (US)
Filed by Illinois Tool Works Inc., Glenview, IL (US)
Filed on Sep. 2, 2020, as Appl. No. 17/10,496.
Claims priority of provisional application 62/900,322, filed on Sep. 13, 2019.
Prior Publication US 2021/0080981 A1, Mar. 18, 2021
Int. Cl. G05D 7/01 (2006.01); G01F 1/36 (2006.01); G01F 15/00 (2006.01); F16K 1/32 (2006.01); F16K 1/36 (2006.01); F16K 1/42 (2006.01); F16K 27/02 (2006.01); F16K 31/06 (2006.01); F16K 37/00 (2006.01); F16K 17/04 (2006.01); H01L 21/67 (2006.01); G05D 7/06 (2006.01); F16K 1/00 (2006.01)
CPC G05D 7/0113 (2013.01) [F16K 1/32 (2013.01); F16K 1/36 (2013.01); F16K 1/42 (2013.01); F16K 17/04 (2013.01); F16K 27/02 (2013.01); F16K 27/029 (2013.01); F16K 31/0655 (2013.01); F16K 31/0675 (2013.01); F16K 37/0091 (2013.01); G01F 1/36 (2013.01); G01F 15/005 (2013.01); H01L 21/67017 (2013.01); H01L 21/67242 (2013.01); F16K 1/00 (2013.01); F16K 37/005 (2013.01); G05D 7/0635 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A valve assembly for controlling fluid flow rate, the valve assembly comprising:
a valve block having an upstream reservoir, a downstream reservoir and a valve seat for communicating fluid from an upstream location to a downstream location;
a stand-alone valve having a moveable member;
a sensor chip package having at least one on-board sensor coupled with the stand-alone valve; and
a controller interface for receiving an at least one measured parametric value provided by the at least one on-board sensor, and for further receiving at least one other parametric value provided by at least one off-board sensor, the at least one off-board sensor located external to the valve assembly at a process tool;
wherein the controller interface generates a control signal for the stand-alone valve, the control signal determined in response to the at least one measured parametric value and the at least one other measured parametric value;
wherein a first parametric value indicating pressure is generated at an upstream entrance channel of the valve assembly; and
wherein a second parametric value indicating pressure is generated at a downstream entrance channel of the valve assembly.