CPC G05D 7/0113 (2013.01) [F16K 1/32 (2013.01); F16K 1/36 (2013.01); F16K 1/42 (2013.01); F16K 17/04 (2013.01); F16K 27/02 (2013.01); F16K 27/029 (2013.01); F16K 31/0655 (2013.01); F16K 31/0675 (2013.01); F16K 37/0091 (2013.01); G01F 1/36 (2013.01); G01F 15/005 (2013.01); H01L 21/67017 (2013.01); H01L 21/67242 (2013.01); F16K 1/00 (2013.01); F16K 37/005 (2013.01); G05D 7/0635 (2013.01)] | 3 Claims |
1. A valve assembly for controlling fluid flow rate, the valve assembly comprising:
a valve block having an upstream reservoir, a downstream reservoir and a valve seat for communicating fluid from an upstream location to a downstream location;
a stand-alone valve having a moveable member;
a sensor chip package having at least one on-board sensor coupled with the stand-alone valve; and
a controller interface for receiving an at least one measured parametric value provided by the at least one on-board sensor, and for further receiving at least one other parametric value provided by at least one off-board sensor, the at least one off-board sensor located external to the valve assembly at a process tool;
wherein the controller interface generates a control signal for the stand-alone valve, the control signal determined in response to the at least one measured parametric value and the at least one other measured parametric value;
wherein a first parametric value indicating pressure is generated at an upstream entrance channel of the valve assembly; and
wherein a second parametric value indicating pressure is generated at a downstream entrance channel of the valve assembly.
|