US 11,669,017 B2
Method for controlling a manufacturing apparatus and associated apparatuses
Roy Werkman, Eindhoven (NL); Bijoy Rajasekharan, Eindhoven (NL); Lydia Marianna Vergaij-Huizer, Eindhoven (NL); Jochem Sebastiaan Wildenberg, Aarle-Rixtel (NL); Ronald Van Ittersum, Tilburg (NL); Pieter Gerardus Jacobus Smorenberg, Rotterdam (NL); Robertus Wilhelmus Van Der Heijden, Tilburg (NL); Xiuhong Wei, Eindhoven (NL); and Hadi Yagubizade, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 16/762,982
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Nov. 9, 2018, PCT No. PCT/EP2018/080708
§ 371(c)(1), (2) Date May 11, 2020,
PCT Pub. No. WO2019/110238, PCT Pub. Date Jun. 13, 2019.
Claims priority of application No. 17205900 (EP), filed on Dec. 7, 2017.
Prior Publication US 2020/0278614 A1, Sep. 3, 2020
Int. Cl. G03F 7/20 (2006.01)
CPC G03F 7/70458 (2013.01) [G03F 7/70616 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers, the method comprising:
determining the plurality of corrections comprising a correction for each layer, based on an actuation potential of the applicable manufacturing apparatus used in the formation of each layer, wherein the determining comprises simultaneously determining, by a hardware computer system, corrections for each layer in terms of a matching parameter.