CPC G03F 7/70458 (2013.01) [G03F 7/70616 (2013.01)] | 20 Claims |
1. A method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers, the method comprising:
determining the plurality of corrections comprising a correction for each layer, based on an actuation potential of the applicable manufacturing apparatus used in the formation of each layer, wherein the determining comprises simultaneously determining, by a hardware computer system, corrections for each layer in terms of a matching parameter.
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