US 11,668,962 B2
Meta device and manufacturing method thereof
Sunil Kim, Osan-si (KR); Changbum Lee, Seoul (KR); and Byounglyong Choi, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Oct. 20, 2020, as Appl. No. 17/75,007.
Application 17/075,007 is a continuation of application No. 16/139,857, filed on Sep. 24, 2018, granted, now 10,845,627.
Claims priority of application No. 10-2017-0131652 (KR), filed on Oct. 11, 2017.
Prior Publication US 2021/0033892 A1, Feb. 4, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. G02F 1/03 (2006.01); G02F 1/07 (2006.01); G02F 1/015 (2006.01); G02B 1/00 (2006.01); G02F 1/29 (2006.01); G02F 1/00 (2006.01); B82Y 20/00 (2011.01); H01Q 15/00 (2006.01)
CPC G02F 1/015 (2013.01) [G02B 1/002 (2013.01); G02F 1/0063 (2013.01); G02F 1/29 (2013.01); B82Y 20/00 (2013.01); G02F 1/0154 (2021.01); G02F 1/292 (2013.01); G02F 2202/30 (2013.01); H01Q 15/0086 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A beam steering apparatus comprising:
a mirror;
a refractive index modulation layer disposed on the mirror;
a nanoantenna on the refractive index modulation layer; and
an insulating layer disposed between the nanoantenna and the refractive index modulation layer, wherein the insulating layer has a thickness distribution in which a first thickness of the insulating layer on a central region of the mirror is less than a second thickness of the insulating layer on an edge region of the mirror,
wherein a refractive index of the refractive index modulation layer is modulated to control a propagation direction of a beam.