US 11,668,667 B2
Micro-actuator defect detection via temperature
Thanongchai Kumpiranont, Korat (TH); and Tappakorn Saktweewanid, Sung Noen (TH)
Assigned to Seagate Technology LLC, Fremont, CA (US)
Filed by Seagate Technology LLC, Fremont, CA (US)
Filed on Jun. 25, 2020, as Appl. No. 16/912,356.
Prior Publication US 2021/0404981 A1, Dec. 30, 2021
Int. Cl. G01N 25/72 (2006.01)
CPC G01N 25/72 (2013.01) 19 Claims
OG exemplary drawing
 
1. A method comprising:
applying a voltage signal to a piezoelectric micro-actuator;
measuring a temperature of the piezoelectric micro-actuator while applying the voltage signal, wherein the measuring of the temperature includes measuring the temperature via an infrared camera; and
determining that the piezoelectric micro-actuator includes a defect based on the measured temperature.