CPC G01N 25/72 (2013.01) | 19 Claims |
1. A method comprising:
applying a voltage signal to a piezoelectric micro-actuator;
measuring a temperature of the piezoelectric micro-actuator while applying the voltage signal, wherein the measuring of the temperature includes measuring the temperature via an infrared camera; and
determining that the piezoelectric micro-actuator includes a defect based on the measured temperature.
|