US 11,668,607 B2
Thermistor element and electromagnetic wave sensor
Maiko Shirokawa, Tokyo (JP); Shinji Hara, Tokyo (JP); Naoki Ohta, Tokyo (JP); Susumu Aoki, Tokyo (JP); and Eiji Komura, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Dec. 1, 2021, as Appl. No. 17/540,004.
Claims priority of application No. JP2020-201818 (JP), filed on Dec. 4, 2020.
Prior Publication US 2022/0178759 A1, Jun. 9, 2022
Int. Cl. G01J 5/22 (2006.01); G01J 5/0831 (2022.01); G01J 5/20 (2006.01)
CPC G01J 5/22 (2013.01) [G01J 5/0831 (2013.01); G01J 2005/202 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A thermistor element comprising:
a thermistor film;
a first electrode provided in contact with one surface of the thermistor film; and
a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein
the thermistor film comprises an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction, and
the [111] preferred orientation in a film thickness direction is:
a state in which a diffraction peak intensity from a (111) plane of the spinel crystal structure is greater than diffraction peak intensities from other crystal planes in a 0-20 scan by out-of-plane measurement of an X-ray diffraction method; or
a state in which only a diffraction peak from the (111) plane of the spinel crystal structure is observed in the 0-20 scan by the out-of-plane measurement of the X-ray diffraction method.