US 11,668,559 B2
Optical measurement apparatus
Yoshihisa Minamigawa, Osaka (JP); Yusuke Suemura, Osaka (JP); and Hideto Takei, Osaka (JP)
Assigned to KEYENCE CORPORATION, Osaka (JP)
Filed by Keyence Corporation, Osaka (JP)
Filed on Sep. 27, 2021, as Appl. No. 17/485,673.
Claims priority of application No. JP2020-193509 (JP), filed on Nov. 20, 2020.
Prior Publication US 2022/0163321 A1, May 26, 2022
Int. Cl. G01B 11/25 (2006.01); G02B 13/22 (2006.01)
CPC G01B 11/254 (2013.01) [G02B 13/22 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An optical measurement apparatus comprising:
a light projection unit projecting a parallel light toward a measurement region;
a light receiving unit placed opposite to the light projection unit side and receiving the parallel light passing the measurement region, and generating an image of a measuring objection placed in the measurement region; and
a dimension measuring means performing a dimension measurement of the measuring object based on the image generated in the light receiving unit,
wherein the light receiving unit includes
a light receiving side telecentric lens in which the parallel light passed through the measurement region is made incident,
a two-dimensional imaging element receiving the light passed through the light receiving side telecentric lens, and capturing an image of the measuring object in the measurement region for generating an image of the measuring object in the measurement region,
a light receiving housing having a box-shape in which an introducing opening is formed on one side surface and storing the two-dimensional imaging element, a reference surface as a reference when placing and a housing installation hole for placing via the reference surface being provided on an outer surface which is different from the one side surface, and the light receiving side telecentric lens being mounted on the light receiving housing,
an imaging element holder holding the two-dimensional imaging element mounted in an adjustable manner of a position and a posture of the two-dimensional imaging element with respect to an inner surface opposite to the one side surface of the light receiving housing, and
a cover closing the introducing opening.