CPC G01B 7/08 (2013.01) [H01J 37/32642 (2013.01); H01L 21/67069 (2013.01); H01L 21/68721 (2013.01); H01J 2237/24564 (2013.01)] | 16 Claims |
1. A method of measuring a ring capacitance, the method comprising:
interfacing a ring with a jig assembly for measuring capacitance of the ring, the ring having a body, the body comprising:
a top surface, a bottom surface, and an inner surface opposite an outer surface, wherein at least the bottom surface and a portion of the outer surface have an external coating;
contacting a measuring device to a first location on the outer surface proximate the bottom surface, wherein the measuring device contacts an opening in the external coating to the body;
contacting the measuring device to a first conductive member electrically coupled to the top surface of the ring; and
measuring a capacitance using the measuring device between the first location on the outer surface proximate the bottom surface and the first conductive member.
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