US 11,668,553 B2
Apparatus and method for controlling edge ring variation
Sathyendra Ghantasala, Fremont, CA (US); Leonid Dorf, San Jose, CA (US); Evgeny Kamenetskiy, Santa Clara, CA (US); Peter Muraoka, Santa Clara, CA (US); Denis M. Koosau, Pleasanton, CA (US); Rajinder Dhindsa, Pleasanton, CA (US); and Andreas Schmid, Meyriez (CH)
Assigned to Applied Materials Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 28, 2021, as Appl. No. 17/161,271.
Claims priority of provisional application 62/976,805, filed on Feb. 14, 2020.
Prior Publication US 2021/0254957 A1, Aug. 19, 2021
Int. Cl. G01B 7/06 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01)
CPC G01B 7/08 (2013.01) [H01J 37/32642 (2013.01); H01L 21/67069 (2013.01); H01L 21/68721 (2013.01); H01J 2237/24564 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A method of measuring a ring capacitance, the method comprising:
interfacing a ring with a jig assembly for measuring capacitance of the ring, the ring having a body, the body comprising:
a top surface, a bottom surface, and an inner surface opposite an outer surface, wherein at least the bottom surface and a portion of the outer surface have an external coating;
contacting a measuring device to a first location on the outer surface proximate the bottom surface, wherein the measuring device contacts an opening in the external coating to the body;
contacting the measuring device to a first conductive member electrically coupled to the top surface of the ring; and
measuring a capacitance using the measuring device between the first location on the outer surface proximate the bottom surface and the first conductive member.