US 11,668,011 B2
Forming method of yttrium oxide fluoride coating film and yttrium oxide fluoride coating film prepared thereby
Jae Hyuk Park, Gyeonggi-do (KR); Dae Gean Kim, Gyeonggi-do (KR); Hye Won Seok, Seoul (KR); and Byung Ki Kim, Gyeonggi-do (KR)
Assigned to IONES CO., LTD., Gyeonggi-do (KR)
Filed by Jae Hyuk Park, Gyeonggi-do (KR); Dae Gean Kim, Gyeonggi-do (KR); Hye Won Seok, Seoul (KR); and Byung Ki Kim, Gyeonggi-do (KR)
Filed on Nov. 26, 2019, as Appl. No. 16/696,701.
Application 16/696,701 is a continuation of application No. PCT/KR2018/005974, filed on May 25, 2018.
Claims priority of application No. 10-2017-0065283 (KR), filed on May 26, 2017; and application No. 10-2017-0065284 (KR), filed on May 26, 2017.
Prior Publication US 2020/0095687 A1, Mar. 26, 2020
Int. Cl. C23C 24/08 (2006.01); C23C 24/06 (2006.01); C01F 17/259 (2020.01); B32B 18/00 (2006.01); C23C 16/44 (2006.01); C23C 24/04 (2006.01); H01L 21/324 (2006.01); C23C 4/123 (2016.01); C23C 30/00 (2006.01); C23C 4/10 (2016.01); C23C 24/00 (2006.01); B32B 15/04 (2006.01); C23C 4/11 (2016.01); C23C 4/12 (2016.01); C23C 4/134 (2016.01); C23C 4/137 (2016.01)
CPC C23C 24/085 (2013.01) [B32B 15/04 (2013.01); B32B 18/00 (2013.01); C01F 17/259 (2020.01); C23C 4/10 (2013.01); C23C 4/11 (2016.01); C23C 4/12 (2013.01); C23C 4/123 (2016.01); C23C 4/134 (2016.01); C23C 4/137 (2016.01); C23C 16/4404 (2013.01); C23C 24/00 (2013.01); C23C 24/04 (2013.01); C23C 24/06 (2013.01); C23C 24/08 (2013.01); C23C 30/00 (2013.01); C23C 30/005 (2013.01); H01L 21/324 (2013.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12993 (2015.01); Y10T 428/2495 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24983 (2015.01); Y10T 428/265 (2015.01)] 17 Claims
OG exemplary drawing
 
1. A forming method of an yttrium oxide fluoride (YOF) coating film, the method comprising the steps of:
pretreating a YOF powder containing yttrium (Y), oxygen (O) and fluorine (F) by heating-treating the YOF powder at a temperature of between 100° C. and 1000° C.;
receiving a transfer gas supplied from a transfer gas supply unit and receiving the pretreated YOF powder supplied from a powder supply unit to transfer the pretreated YOF powder in an aerosol state; and
colliding, smashing, and spraying the pretreated YOF powder transferred in the aerosol state onto a substrate in a process chamber to form an yttrium oxide fluoride (YOF) coating film on the substrate;
wherein a haze value of the YOF coating film ranges from 0.5% to 5%.