CPC C23C 24/085 (2013.01) [B32B 15/04 (2013.01); B32B 18/00 (2013.01); C01F 17/259 (2020.01); C23C 4/10 (2013.01); C23C 4/11 (2016.01); C23C 4/12 (2013.01); C23C 4/123 (2016.01); C23C 4/134 (2016.01); C23C 4/137 (2016.01); C23C 16/4404 (2013.01); C23C 24/00 (2013.01); C23C 24/04 (2013.01); C23C 24/06 (2013.01); C23C 24/08 (2013.01); C23C 30/00 (2013.01); C23C 30/005 (2013.01); H01L 21/324 (2013.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12993 (2015.01); Y10T 428/2495 (2015.01); Y10T 428/24967 (2015.01); Y10T 428/24983 (2015.01); Y10T 428/265 (2015.01)] | 17 Claims |
1. A forming method of an yttrium oxide fluoride (YOF) coating film, the method comprising the steps of:
pretreating a YOF powder containing yttrium (Y), oxygen (O) and fluorine (F) by heating-treating the YOF powder at a temperature of between 100° C. and 1000° C.;
receiving a transfer gas supplied from a transfer gas supply unit and receiving the pretreated YOF powder supplied from a powder supply unit to transfer the pretreated YOF powder in an aerosol state; and
colliding, smashing, and spraying the pretreated YOF powder transferred in the aerosol state onto a substrate in a process chamber to form an yttrium oxide fluoride (YOF) coating film on the substrate;
wherein a haze value of the YOF coating film ranges from 0.5% to 5%.
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