US 11,668,009 B2
Composite member
Kengo Goto, Osaka (JP); Tomoaki Ikeda, Osaka (JP); Akihisa Hosoe, Osaka (JP); Masanori Sugisawa, Sakata (JP); Fukuto Ishikawa, Sakata (JP); and Hideaki Morigami, Toyama (JP)
Assigned to Sumitomo Electric Industries, Ltd., Osaka (JP); and A.L.M.T. Corp., Tokyo (JP)
Appl. No. 16/969,238
Filed by Sumitomo Electric Industries, Ltd., Osaka (JP); and A.L.M.T. Corp., Tokyo (JP)
PCT Filed Jan. 30, 2019, PCT No. PCT/JP2019/003137
§ 371(c)(1), (2) Date Aug. 12, 2020,
PCT Pub. No. WO2019/159694, PCT Pub. Date Aug. 22, 2019.
Claims priority of application No. JP2018-023823 (JP), filed on Feb. 14, 2018.
Prior Publication US 2021/0002769 A1, Jan. 7, 2021
Int. Cl. C23C 18/16 (2006.01); C23C 18/18 (2006.01); C23C 26/00 (2006.01); C23C 18/50 (2006.01); C22C 26/00 (2006.01); B32B 15/04 (2006.01); H01L 23/373 (2006.01); C22C 1/04 (2023.01); C22C 1/05 (2023.01); C22C 5/06 (2006.01); C23C 18/32 (2006.01); H01L 21/48 (2006.01); B32B 19/00 (2006.01); B32B 15/16 (2006.01); B32B 19/04 (2006.01); B22F 7/02 (2006.01)
CPC C23C 18/1651 (2013.01) [B32B 15/04 (2013.01); B32B 15/043 (2013.01); B32B 15/16 (2013.01); B32B 19/00 (2013.01); B32B 19/041 (2013.01); C22C 1/0466 (2013.01); C22C 1/05 (2013.01); C22C 5/06 (2013.01); C22C 26/00 (2013.01); C23C 18/1637 (2013.01); C23C 18/1803 (2013.01); C23C 18/1827 (2013.01); C23C 18/1844 (2013.01); C23C 18/1879 (2013.01); C23C 18/32 (2013.01); C23C 18/50 (2013.01); H01L 21/4871 (2013.01); H01L 23/3732 (2013.01); H01L 23/3736 (2013.01); B22F 7/02 (2013.01); B22F 2998/10 (2013.01); B22F 2999/00 (2013.01); B32B 2255/06 (2013.01); B32B 2255/205 (2013.01); B32B 2255/28 (2013.01); Y10T 428/12493 (2015.01); Y10T 428/12535 (2015.01); Y10T 428/12625 (2015.01); Y10T 428/12868 (2015.01); Y10T 428/12875 (2015.01); Y10T 428/12944 (2015.01); Y10T 428/12993 (2015.01)] 3 Claims
OG exemplary drawing
 
1. A composite member comprising:
a substrate formed of a composite material containing
a plurality of diamond grains, and
a metal phase that bonds the diamond grains; and
a coating layer made of metal and coating at least a part of a surface of the substrate, wherein
the surface of the substrate includes
a surface of the metal phase, and
a protrusion formed of a part of at least one diamond grain of the diamond grains and protruding from the surface of the metal phase,
in a plan view, the coating layer includes
a metal coating portion coating the surface of the metal phase, and
a grain coating portion coating the protrusion and not coating the surface of the metal phase,
a ratio of a thickness of the grain coating portion to a thickness of the metal coating portion is greater than zero and equal to or less than 0.80,
at least a part of a surface of the composite member has a surface roughness as an arithmetic mean roughness Ra of less than 2.0 μm,
the diamond grains have a coating film that coats at least a part of a surface of each diamond grain, and
the coating film is formed of a carbide of one or more types of metals selected from Ti, Hf, and Zr.