US 11,667,620 B2
Composition, film, film-forming method and patterned substrate-producing method
Hiroki Nakatsu, Tokyo (JP); Kazunori Takanashi, Tokyo (JP); Kazunori Sakai, Tokyo (JP); Yuushi Matsumura, Tokyo (JP); and Hiroki Nakagawa, Tokyo (JP)
Assigned to JSR CORPORATION, Tokyo (JP)
Filed by JSR CORPORATION, Tokyo (JP)
Filed on Mar. 5, 2020, as Appl. No. 16/809,740.
Application 16/809,740 is a continuation of application No. PCT/JP2018/032434, filed on Aug. 31, 2018.
Claims priority of application No. JP2017-172559 (JP), filed on Sep. 7, 2017.
Prior Publication US 2020/0199093 A1, Jun. 25, 2020
Int. Cl. C07D 317/64 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); C07D 405/14 (2006.01); C09D 201/06 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01)
CPC C07D 317/64 (2013.01) [C07D 405/14 (2013.01); C09D 201/06 (2013.01); G03F 7/11 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01)] 18 Claims
 
1. A composition comprising:
a compound which is a polymer or non-polymeric compound; and
a solvent,
wherein the polymer comprises three or more groups each independently represented by formula (1), the non-polymeric compound is represented by formula (2), and the compound has a molecular weight of no less than 200 and no greater than 2,000, and has a percentage content of carbon atoms of no less than 40% by mass:

OG Complex Work Unit Chemistry
wherein, in the formula (1) and the formula (2):
R1 and R2 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms, or R1 and R2 taken together represent a part of an alicyclic structure having 3 to 20 ring atoms constituted together with the carbon atom to which R1 and R2 bond;
Ar1 represents a group obtained by removing (n+3) hydrogen atoms from an arene or heteroarene having 6 to 20 ring atoms;
X represents an oxygen atom, —CR3R4—, —CR3R4—O— or —O—CR3R4—, wherein R3 and R4 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms, or R3 and R4 taken together represent a part of an alicyclic structure having 3 to 20 ring atoms constituted together with the carbon atom to which R3 and R4 bond; and
n is an integer of 0 to 9, wherein
in a case in which n is 1, R5 represents a hydroxy group, a halogen atom, a nitro group or a monovalent organic group having 1 to 20 carbon atoms, and
in a case in which n is no less than 2, a plurality of R5s are identical or different from each other, and each R5 independently represents a hydroxy group, a halogen atom, a nitro group or a monovalent organic group having 1 to 20 carbon atoms, or two or more of the plurality of R5s taken together represent a part of a ring structure having 4 to 20 ring atoms constituted together with an atom chain to which the two or more of the plurality of R5s bond,
in the formula (1): * denotes a binding site to a part other than the group represented by the formula (1) in the compound, and
in the formula (2): R6 represents a hydrocarbon group having 1 to 60 carbon atoms and having a valency of (m+k), a group (β) that comprises a divalent hetero atom-containing group between two adjacent carbon atoms of the hydrocarbon group, or a group obtained by substituting a part or all of hydrogen atoms included in the hydrocarbon group or the group (β) with a monovalent hetero atom-containing group;
R7 represents a monovalent organic group having 1 to 20 carbon atoms;
m is an integer of 3 to 10; and
k is an integer of 0 to 9, wherein (m+k) is no greater than 10, and wherein a plurality of R1s are identical or different from each other, a plurality of R2s are identical or different from each other, a plurality of Xs are identical or different from each other, a plurality of Ar1s are identical or different from each other and a plurality of n's are identical or different from each other, and in a case in which k is no less than 2, a plurality of R7s are identical or different from each other,
wherein when the compound is a polymer, the polymer is at least one selected from the group consisting of a phenol resin, a naphthol resin, a fluorene resin, an aromatic ring-containing vinyl-based resin, an acenaphthylene resin, an indene resin, an arylene resin, a triazine resin, a pyrene resin, a fullerene resin, and a calixarene resin, and
wherein a content of the compound in the composition relative to a total mass of a solid component of the composition is 50% by mass or more.