CPC C04B 35/505 (2013.01) [C01F 17/218 (2020.01); C01F 17/265 (2020.01); C04B 35/486 (2013.01); C04B 35/62222 (2013.01); C04B 35/62813 (2013.01); C04B 35/62815 (2013.01); C04B 35/62823 (2013.01); C04B 35/62828 (2013.01); C04B 35/62884 (2013.01); C04B 35/62889 (2013.01); C04B 35/62897 (2013.01); C04B 35/6325 (2013.01); C04B 35/64 (2013.01); C04B 35/645 (2013.01); C23C 4/10 (2013.01); C23C 4/134 (2016.01); C23C 14/3414 (2013.01); C23C 16/30 (2013.01); C23C 16/405 (2013.01); C23C 16/4417 (2013.01); C23C 16/45525 (2013.01); C23C 16/45555 (2013.01); C01P 2004/64 (2013.01); C01P 2004/84 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/441 (2013.01); C04B 2235/445 (2013.01); C04B 2235/52 (2013.01); C04B 2235/528 (2013.01); C04B 2235/5454 (2013.01); C04B 2235/666 (2013.01); C04B 2235/77 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01)] | 18 Claims |
1. A method comprising:
performing atomic layer deposition to form a plurality of nanoparticles, comprising forming a thin film coating over core particles,
wherein the core particles comprise a first material selected from the group consisting of a rare earth metal-containing fluoride, a rare earth metal containing oxyfluoride and combinations thereof; and
wherein the thin film coating comprises a second material selected from a group consisting of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof,
wherein the portion of the plurality of nanoparticles have a donut-shape comprising a spherical form with indentations on opposite sides.
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