US 11,667,578 B2
Methods of making nanopowders, nanoceramic materials and nanoceramic components
Guodong Zhan, Dhahran (SA); Xiaowei Wu, San Jose, CA (US); Xiao Ming He, Fremont, CA (US); and Jennifer Y. Sun, Mountain View, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 3, 2022, as Appl. No. 17/686,053.
Application 17/686,053 is a division of application No. 16/168,003, filed on Oct. 23, 2018, granted, now 11,279,656.
Claims priority of provisional application 62/578,098, filed on Oct. 27, 2017.
Prior Publication US 2022/0234959 A1, Jul. 28, 2022
Int. Cl. C04B 35/505 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01); C23C 4/134 (2016.01); C23C 4/10 (2016.01); C04B 35/628 (2006.01); C04B 35/622 (2006.01); C04B 35/64 (2006.01); C04B 35/632 (2006.01); C23C 16/44 (2006.01); C04B 35/486 (2006.01); C23C 14/34 (2006.01); C04B 35/645 (2006.01); C23C 16/40 (2006.01); C01F 17/265 (2020.01); C01F 17/218 (2020.01)
CPC C04B 35/505 (2013.01) [C01F 17/218 (2020.01); C01F 17/265 (2020.01); C04B 35/486 (2013.01); C04B 35/62222 (2013.01); C04B 35/62813 (2013.01); C04B 35/62815 (2013.01); C04B 35/62823 (2013.01); C04B 35/62828 (2013.01); C04B 35/62884 (2013.01); C04B 35/62889 (2013.01); C04B 35/62897 (2013.01); C04B 35/6325 (2013.01); C04B 35/64 (2013.01); C04B 35/645 (2013.01); C23C 4/10 (2013.01); C23C 4/134 (2016.01); C23C 14/3414 (2013.01); C23C 16/30 (2013.01); C23C 16/405 (2013.01); C23C 16/4417 (2013.01); C23C 16/45525 (2013.01); C23C 16/45555 (2013.01); C01P 2004/64 (2013.01); C01P 2004/84 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/441 (2013.01); C04B 2235/445 (2013.01); C04B 2235/52 (2013.01); C04B 2235/528 (2013.01); C04B 2235/5454 (2013.01); C04B 2235/666 (2013.01); C04B 2235/77 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method comprising:
performing atomic layer deposition to form a plurality of nanoparticles, comprising forming a thin film coating over core particles,
wherein the core particles comprise a first material selected from the group consisting of a rare earth metal-containing fluoride, a rare earth metal containing oxyfluoride and combinations thereof; and
wherein the thin film coating comprises a second material selected from a group consisting of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride and combinations thereof,
wherein the portion of the plurality of nanoparticles have a donut-shape comprising a spherical form with indentations on opposite sides.