US 11,667,577 B2
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
Jennifer Y. Sun, Mountain View, CA (US); and David Fenwick, Los Altos Hills, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 15, 2021, as Appl. No. 17/232,013.
Application 17/232,013 is a division of application No. 16/279,247, filed on Feb. 19, 2019, granted, now 11,014,853.
Claims priority of provisional application 62/639,941, filed on Mar. 7, 2018.
Prior Publication US 2021/0230070 A1, Jul. 29, 2021
Int. Cl. C04B 35/30 (2006.01); C04B 35/505 (2006.01); C04B 35/638 (2006.01); C04B 35/622 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); C04B 35/645 (2006.01); H01L 21/687 (2006.01); C23C 30/00 (2006.01); C04B 41/00 (2006.01)
CPC C04B 35/505 (2013.01) [C04B 35/62222 (2013.01); C04B 35/638 (2013.01); C04B 35/645 (2013.01); C04B 41/00 (2013.01); C23C 30/00 (2013.01); H01J 37/32495 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/604 (2013.01); C04B 2235/612 (2013.01); C04B 2235/656 (2013.01); C04B 2235/662 (2013.01); C04B 2235/72 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/94 (2013.01); C04B 2235/95 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01); C04B 2235/9661 (2013.01); C04B 2235/9669 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of manufacturing a chamber component for a processing chamber, comprising: mixing a Y2O3 powder with a ZrO2 powder to form a Y2O3-ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; performing cold isostatic pressing using the Y2O3-ZrO2 powder to form a green body having an approximate shape of the chamber component; performing a first heat treatment on the green body to burn off an organic binder in the green body; subsequently performing a second heat treatment on the green body at a temperature of about 1750-1900° C. to sinter the green body and produce a sintered ceramic body consisting essentially of one or more phase of Y2O3-ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; machining the sintered ceramic body; and performing a purification process on the sintered ceramic body to remove trace metals from the sintered ceramic body, wherein after the purification process the sintered ceramic body has a purity of at least 99.9%.