CPC C04B 35/505 (2013.01) [C04B 35/62222 (2013.01); C04B 35/638 (2013.01); C04B 35/645 (2013.01); C04B 41/00 (2013.01); C23C 30/00 (2013.01); H01J 37/32495 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/604 (2013.01); C04B 2235/612 (2013.01); C04B 2235/656 (2013.01); C04B 2235/662 (2013.01); C04B 2235/72 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/94 (2013.01); C04B 2235/95 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01); C04B 2235/9661 (2013.01); C04B 2235/9669 (2013.01)] | 19 Claims |
1. A method of manufacturing a chamber component for a processing chamber, comprising: mixing a Y2O3 powder with a ZrO2 powder to form a Y2O3-ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; performing cold isostatic pressing using the Y2O3-ZrO2 powder to form a green body having an approximate shape of the chamber component; performing a first heat treatment on the green body to burn off an organic binder in the green body; subsequently performing a second heat treatment on the green body at a temperature of about 1750-1900° C. to sinter the green body and produce a sintered ceramic body consisting essentially of one or more phase of Y2O3-ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; machining the sintered ceramic body; and performing a purification process on the sintered ceramic body to remove trace metals from the sintered ceramic body, wherein after the purification process the sintered ceramic body has a purity of at least 99.9%.
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