CPC C04B 35/48 (2013.01) [C04B 35/50 (2013.01); C04B 35/505 (2013.01); C09D 1/00 (2013.01); C23C 16/45525 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3248 (2013.01); C07F 5/00 (2013.01); C07F 7/00 (2013.01)] | 7 Claims |
1. An article comprising:
a body; and
a rare earth metal containing oxide coating on a surface of the body,
wherein the rare earth metal containing oxide coating comprises 10 mol % to about 40 mol % of a first metal, about 5 mol % to about 40 mol % of a second metal, and about 20 mol % to about 85 mol % of oxygen, wherein the first metal is a rare earth metal, and the second metal is selected from a group consisting of hafnium and tantalum,
wherein the rare earth metal containing oxide coating comprises a homogenous mixture of the first metal and the second metal, and
wherein the article is a component of a processing chamber selected from a group consisting of a chamber wall, a shower head, a nozzle, a plasma generation unit, a radiofrequency electrode, an electrode housing, a diffuser, and a gas line.
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