US 11,667,575 B2
Erosion resistant metal oxide coatings
Xiaowei Wu, San Jose, CA (US); Jennifer Y. Sun, Mountain View, CA (US); and Michael R. Rice, Pleasanton, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 18, 2018, as Appl. No. 16/39,005.
Prior Publication US 2020/0024194 A1, Jan. 23, 2020
Int. Cl. C04B 35/48 (2006.01); C04B 35/505 (2006.01); C09D 1/00 (2006.01); C23C 16/455 (2006.01); C04B 35/50 (2006.01); C07F 7/00 (2006.01); C07F 5/00 (2006.01)
CPC C04B 35/48 (2013.01) [C04B 35/50 (2013.01); C04B 35/505 (2013.01); C09D 1/00 (2013.01); C23C 16/45525 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3248 (2013.01); C07F 5/00 (2013.01); C07F 7/00 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An article comprising:
a body; and
a rare earth metal containing oxide coating on a surface of the body,
wherein the rare earth metal containing oxide coating comprises 10 mol % to about 40 mol % of a first metal, about 5 mol % to about 40 mol % of a second metal, and about 20 mol % to about 85 mol % of oxygen, wherein the first metal is a rare earth metal, and the second metal is selected from a group consisting of hafnium and tantalum,
wherein the rare earth metal containing oxide coating comprises a homogenous mixture of the first metal and the second metal, and
wherein the article is a component of a processing chamber selected from a group consisting of a chamber wall, a shower head, a nozzle, a plasma generation unit, a radiofrequency electrode, an electrode housing, a diffuser, and a gas line.