CPC B67D 7/743 (2013.01) [B01J 4/00 (2013.01); B01J 4/001 (2013.01); B67D 7/0227 (2013.01); B67D 7/36 (2013.01); B67D 7/70 (2013.01); C11D 7/04 (2013.01); C11D 7/50 (2013.01); B01J 4/008 (2013.01); B01J 4/02 (2013.01); H01L 21/02041 (2013.01)] | 12 Claims |
1. A dilute chemical solution production device, which is a production device of dilute chemical solution for adding a second liquid to a first liquid to thereby produce a dilute chemical solution of the second liquid, the production device comprising:
a first piping having an inner diameter of 10-50 mm for flowing the first liquid;
a stock solution tank for accumulating the second liquid;
a second piping having an inner diameter of 0.1-4 mm for connecting the stock solution tank and the first piping; and
a plunger pump for adding the second liquid into the first piping through the second piping;
wherein a purge gas supply part is attached to the stock solution tank, N2 gas is supplied from the purge gas supply part, the stock solution tank is subjected to pressurization by the N2 gas, and
a front end of the second piping is connected, via a bore-through joint, to an approximately central position in a radial direction of the first piping.
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