CPC B23K 26/127 (2013.01) [B23K 26/352 (2015.10)] | 5 Claims |
1. A laser crystallizing apparatus, comprising:
a laser generator generating a laser beam; an optical system photo-converting the laser beam to make a converted laser beam; and
a beam transmitting unit including a passage through which the converted laser beam is transmitted into a chamber, wherein
the beam transmitting unit includes:
a chamber window provided on the chamber to transmit the laser beam, and
a shield window rotationally disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window,
wherein the shield window comprises a base and six or more surfaces perpendicular to the base that form sides of a polygonal column, wherein the laser beam is transmitted through at least two of the six or more surfaces.
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