US 11,666,989 B2
Laser crystallizing apparatus
Hong Ro Lee, Seongnam-si (KR); and Chung Hwan Lee, Seoul (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Apr. 7, 2020, as Appl. No. 16/842,272.
Application 16/842,272 is a division of application No. 15/131,226, filed on Apr. 18, 2016, abandoned.
Claims priority of application No. 10-2015-0121077 (KR), filed on Aug. 27, 2015.
Prior Publication US 2020/0230741 A1, Jul. 23, 2020
Int. Cl. B23K 26/12 (2014.01); B23K 26/352 (2014.01)
CPC B23K 26/127 (2013.01) [B23K 26/352 (2015.10)] 5 Claims
OG exemplary drawing
 
1. A laser crystallizing apparatus, comprising:
a laser generator generating a laser beam; an optical system photo-converting the laser beam to make a converted laser beam; and
a beam transmitting unit including a passage through which the converted laser beam is transmitted into a chamber, wherein
the beam transmitting unit includes:
a chamber window provided on the chamber to transmit the laser beam, and
a shield window rotationally disposed below the chamber window to prevent a material generated in the chamber from reaching the chamber window,
wherein the shield window comprises a base and six or more surfaces perpendicular to the base that form sides of a polygonal column, wherein the laser beam is transmitted through at least two of the six or more surfaces.