CPC B01D 61/58 (2013.01) [B01D 3/145 (2013.01); B01D 61/08 (2013.01); B01D 61/18 (2013.01); B01D 65/02 (2013.01); B01D 69/02 (2013.01); B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); B01D 71/56 (2013.01); H01L 21/67017 (2013.01); B01D 2311/25 (2013.01); B01D 2311/2669 (2013.01); B01D 2313/50 (2013.01); B01D 2317/025 (2013.01); B01D 2317/08 (2013.01); B01D 2325/02 (2013.01); B01D 2325/14 (2013.01); B01D 2325/16 (2013.01); G03F 7/26 (2013.01)] | 6 Claims |
1. A filtering device for obtaining a chemical liquid by purifying a liquid to be purified, the device comprising:
an inlet portion;
an outlet portion;
a filter A;
at least one filter B different from the filter A;
a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, and
a tank arranged in series between the filter A and the filter B on the flow path,
wherein the filter A includes at least one selected from the group consisting of a first porous membrane having a porous base material made of polytetrafluoroethylene and a non-crosslinked coating which is formed to cover the porous base material and contains a perfluorosulfonic acid polymer and a second porous membrane containing polytetrafluoroethylene blended with a perfluorosulfonic acid polymer,
the filter B includes at least one filter BU disposed on an upstream side of the filter A on the flow path, and
the filter BU contains a resin having an anion exchange group.
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