US 11,666,864 B2
Filtering device, purification device, and method for manufacturing chemical liquid
Tetsuya Shimizu, Haibara-gun (JP); Tetsuya Kamimura, Haibara-gun (JP); Tadashi Omatsu, Haibara-gun (JP); and Satomi Takahashi, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Aug. 12, 2020, as Appl. No. 16/991,225.
Application 16/991,225 is a continuation of application No. PCT/JP2019/009500, filed on Mar. 8, 2019.
Claims priority of application No. JP2018-054993 (JP), filed on Mar. 22, 2018.
Prior Publication US 2020/0368692 A1, Nov. 26, 2020
Int. Cl. B01D 61/58 (2006.01); B01D 3/14 (2006.01); B01D 61/08 (2006.01); B01D 61/18 (2006.01); B01D 65/02 (2006.01); B01D 69/02 (2006.01); B01D 69/12 (2006.01); B01D 71/26 (2006.01); B01D 71/36 (2006.01); B01D 71/56 (2006.01); H01L 21/67 (2006.01); G03F 7/26 (2006.01)
CPC B01D 61/58 (2013.01) [B01D 3/145 (2013.01); B01D 61/08 (2013.01); B01D 61/18 (2013.01); B01D 65/02 (2013.01); B01D 69/02 (2013.01); B01D 69/12 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); B01D 71/56 (2013.01); H01L 21/67017 (2013.01); B01D 2311/25 (2013.01); B01D 2311/2669 (2013.01); B01D 2313/50 (2013.01); B01D 2317/025 (2013.01); B01D 2317/08 (2013.01); B01D 2325/02 (2013.01); B01D 2325/14 (2013.01); B01D 2325/16 (2013.01); G03F 7/26 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A filtering device for obtaining a chemical liquid by purifying a liquid to be purified, the device comprising:
an inlet portion;
an outlet portion;
a filter A;
at least one filter B different from the filter A;
a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, and
a tank arranged in series between the filter A and the filter B on the flow path,
wherein the filter A includes at least one selected from the group consisting of a first porous membrane having a porous base material made of polytetrafluoroethylene and a non-crosslinked coating which is formed to cover the porous base material and contains a perfluorosulfonic acid polymer and a second porous membrane containing polytetrafluoroethylene blended with a perfluorosulfonic acid polymer,
the filter B includes at least one filter BU disposed on an upstream side of the filter A on the flow path, and
the filter BU contains a resin having an anion exchange group.