CPC H01L 31/022425 (2013.01) [H01B 1/023 (2013.01); H01B 1/16 (2013.01); H01B 1/22 (2013.01); H01L 31/02167 (2013.01); H01L 31/068 (2013.01); H01L 31/1864 (2013.01); H01L 31/1868 (2013.01)] | 3 Claims |
1. A solar cell manufacturing method comprising:
forming a passivation film that protects a semiconductor substrate;
forming a first finger electrode connected to the semiconductor substrate on a main surface of the semiconductor substrate;
forming an intermediate layer on the first finger electrode; and
forming a first bus bar electrode that intersects the first finger electrode via the intermediate layer, wherein
in the forming the first finger electrode, conductive aluminum paste is baked to form the first finger electrode,
in the forming the intermediate layer, first conductive silver paste containing glass frit is baked to form the intermediate layer,
the conductive aluminum paste and the first conductive silver paste are simultaneously baked,
in the forming the first bus bar electrode, second conductive silver paste containing epoxy resin or acrylic resin is heated to form the first bus bar electrode, and
a difference between a baking time peak temperature of the conductive aluminum paste and the first conductive silver paste and a heating time peak temperature of the second conductive silver paste is 300° C. or more and 700° C. or less.
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