US 11,658,251 B2
Solar cell, solar cell manufacturing system, and solar cell manufacturing method
Ryo Mitta, Ibaraki (JP); Takenori Watabe, Gunma (JP); and Hiroyuki Ohtsuka, Nagano (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed on Jul. 14, 2022, as Appl. No. 17/864,886.
Application 17/864,886 is a division of application No. 16/308,294, granted, now 11,424,372, previously published as PCT/JP2017/014035, filed on Apr. 4, 2017.
Claims priority of application No. JP2016-115893 (JP), filed on Jun. 10, 2016.
Prior Publication US 2022/0352396 A1, Nov. 3, 2022
Int. Cl. H01L 31/0224 (2006.01); H01B 1/02 (2006.01); H01B 1/16 (2006.01); H01B 1/22 (2006.01); H01L 31/0216 (2014.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01)
CPC H01L 31/022425 (2013.01) [H01B 1/023 (2013.01); H01B 1/16 (2013.01); H01B 1/22 (2013.01); H01L 31/02167 (2013.01); H01L 31/068 (2013.01); H01L 31/1864 (2013.01); H01L 31/1868 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A solar cell manufacturing method comprising:
forming a passivation film that protects a semiconductor substrate;
forming a first finger electrode connected to the semiconductor substrate on a main surface of the semiconductor substrate;
forming an intermediate layer on the first finger electrode; and
forming a first bus bar electrode that intersects the first finger electrode via the intermediate layer, wherein
in the forming the first finger electrode, conductive aluminum paste is baked to form the first finger electrode,
in the forming the intermediate layer, first conductive silver paste containing glass frit is baked to form the intermediate layer,
the conductive aluminum paste and the first conductive silver paste are simultaneously baked,
in the forming the first bus bar electrode, second conductive silver paste containing epoxy resin or acrylic resin is heated to form the first bus bar electrode, and
a difference between a baking time peak temperature of the conductive aluminum paste and the first conductive silver paste and a heating time peak temperature of the second conductive silver paste is 300° C. or more and 700° C. or less.