US 11,658,089 B2
Semiconductor device
Shuji Wakaiki, Tokyo (JP); Shota Sato, Tokyo (JP); Kenta Fujii, Tokyo (JP); and Takashi Kumagai, Tokyo (JP)
Assigned to MITSUBISHI ELECTRIC CORPORATION, Tokyo (JP)
Appl. No. 16/770,025
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
PCT Filed Dec. 11, 2018, PCT No. PCT/JP2018/045379
§ 371(c)(1), (2) Date Jun. 4, 2020,
PCT Pub. No. WO2019/117107, PCT Pub. Date Jun. 20, 2019.
Claims priority of application No. JP2017-239520 (JP), filed on Dec. 14, 2017.
Prior Publication US 2020/0388550 A1, Dec. 10, 2020
Int. Cl. H01L 23/367 (2006.01); H01L 21/48 (2006.01)
CPC H01L 23/3672 (2013.01) [H01L 21/4882 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a printed circuit board;
a heat diffusion part bonded to a first main face of the printed circuit board with a first bonding material;
an electronic component including a heat radiator plate bonded to the heat diffusion part with a second bonding material; and
a heat radiation part disposed directly on a second main face of the printed circuit board,
wherein the printed circuit board includes:
an insulation layer;
first and second conductor layers disposed respectively on first and second main faces of the insulation layer;
a plurality of heat radiation vias penetrating from the first conductor layer to the second conductor layer on the insulation layer; and
a conductor film covering inner walls of the plurality of heat radiation vias,
the plurality of heat radiation vias is provided at positions overlapping the heat diffusion part and the electronic component in plan view viewed from the first main face of the printed circuit board, and
the heat radiation part is disposed overlapping at least some of the plurality of heat radiation vias in plan view viewed from the second main face of the printed circuit board, and includes:
a heat radiation member having electrical insulating properties and thermal conductivity; and
a coolant having thermal conductivity, and
the heat radiation member and the coolant are disposed on the second conductor layer of the printed circuit board.