CPC H01J 37/28 (2013.01) [G01N 23/06 (2013.01); G01N 23/203 (2013.01); G01N 23/2251 (2013.01); H01J 37/045 (2013.01); H01J 37/1474 (2013.01)] | 18 Claims |
1. A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computer system to cause the computer system to perform a method comprising:
providing a sample having a scanning area, wherein the sample is determined to have a plurality of unit areas;
scanning a unit area of the plurality of unit areas with a scanning charged-particle beam;
blanking a first unit area adjacent to the scanned unit area, wherein blanking the first unit area comprises deflecting a charged-particle beam of a charged-particle beam tool such that the deflected charged-particle beam no longer reaches the sample.
|