US 11,658,004 B2
Method for scanning a sample by a charged particle beam system
Adam Lyons, Albany, NY (US); and Thomas I. Wallow, San Carlos, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Sep. 20, 2021, as Appl. No. 17/480,032.
Application 17/480,032 is a continuation of application No. 16/730,875, filed on Dec. 30, 2019, granted, now 11,127,563.
Claims priority of provisional application 62/943,695, filed on Dec. 4, 2019.
Claims priority of provisional application 62/787,121, filed on Dec. 31, 2018.
Prior Publication US 2022/0084784 A1, Mar. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/28 (2006.01); H01J 37/04 (2006.01); H01J 37/147 (2006.01); G01N 23/06 (2018.01); G01N 23/203 (2006.01); G01N 23/2251 (2018.01)
CPC H01J 37/28 (2013.01) [G01N 23/06 (2013.01); G01N 23/203 (2013.01); G01N 23/2251 (2013.01); H01J 37/045 (2013.01); H01J 37/1474 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computer system to cause the computer system to perform a method comprising:
providing a sample having a scanning area, wherein the sample is determined to have a plurality of unit areas;
scanning a unit area of the plurality of unit areas with a scanning charged-particle beam;
blanking a first unit area adjacent to the scanned unit area, wherein blanking the first unit area comprises deflecting a charged-particle beam of a charged-particle beam tool such that the deflected charged-particle beam no longer reaches the sample.