CPC H01J 37/224 (2013.01) [H01J 9/22 (2013.01)] | 13 Claims |
1. A method of manufacturing a phosphor panel, comprising:
forming a phosphor layer having a plurality of phosphor particles on a light transmissive substrate;
forming an organic film on the phosphor layer;
forming a metal reflection film on the organic film;
removing the organic film by firing;
forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.
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