US 11,656,453 B2
Optical imaging arrangement with a piezoelectric device
Yim-Bun Patrick Kwan, Oberkochen (DE); Axel Lorenz, Meissen (DE); and Jasper Wesselingh, Moettingen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Aug. 3, 2020, as Appl. No. 16/983,172.
Application 16/983,172 is a continuation of application No. 15/912,959, filed on Mar. 6, 2018, granted, now 10,732,402.
Application 15/912,959 is a continuation of application No. PCT/EP2016/072595, filed on Sep. 22, 2016.
Claims priority of application No. 102015218229.0 (DE), filed on Sep. 23, 2015.
Prior Publication US 2020/0363628 A1, Nov. 19, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 26/08 (2006.01); G03F 7/20 (2006.01); G02B 27/00 (2006.01)
CPC G02B 26/0825 (2013.01) [G02B 27/0025 (2013.01); G03F 7/20 (2013.01); G03F 7/70266 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An arrangement, comprising:
an optical element which comprises an optical element body having a front side and a rear side opposite the front side, an optical surface being supported by the front side of the optical element body;
a piezoelectric device comprising a first electrode and a piezoelectric element; and
a second electrode,
wherein:
the first electrode is located on the front side of the optical element body;
the optical surface comprises a reflective layer;
the reflective layer is disposed directly on the first electrode;
the piezoelectric element defines a piezoelectric section of the optical element body; and
the first electrode is configured to cooperate with the piezoelectric element and the second electrode when the second electrode is located on the rear side of the optical element body and the piezoelectric element is located between the first and second electrodes.