CPC G01J 5/0007 (2013.01) [C23C 16/402 (2013.01); C23C 16/4584 (2013.01); C23C 16/45551 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); G01J 5/07 (2022.01); G02B 26/12 (2013.01); G05D 23/1931 (2013.01); H01L 21/0228 (2013.01); H01L 21/02164 (2013.01); H01L 21/67248 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01)] | 5 Claims |
1. A temperature control method used in a heat treatment apparatus for performing a predetermined film forming process on a substrate by mounting a set of a plurality of substrates on a surface of a rotary table installed inside a processing vessel and heating the plurality of substrates by a heating part while rotating the rotary table, the temperature control method comprising:
mounting a set of a plurality of substrates on the rotary table;
measuring, by a contact type thermocouple, a temperature of the heating part;
measuring, by a non-contact type radiation temperature measuring part, a temperature of the substrate mounted on the rotary table in a state where the rotary table is being rotated; and
controlling, by a temperature controller, the thermocouple and the radiation temperature measuring part to perform a process including:
prior to performing the predetermined film forming process, mounting a set of a plurality of dummy substrates on the rotary table, measuring a first measurement value for a temperature of the heating part by the thermocouple, measuring a second measurement value for a temperature of the plurality of dummy substrates by the radiation temperature measuring part in a state where the rotary table is being rotated, tabulating a correlation between the first measurement value and the second measurement value, and storing the tabulated correlation between the first measurement value and the second measurement value into a storage part;
determining, by the temperature controller, whether the second measurement value is the temperature of the plurality of dummy substrates or a temperature of the rotary table; and
after storing the tabulated correlation, performing the predetermined film forming process on additional sets of a plurality of substrates while controlling the heating part based on the tabulated correlation stored in the storage part,
wherein the thermocouple and the radiation temperature measuring part measure temperatures in a plurality of regions defined along a diameter direction of the rotary table.
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