US 11,655,262 B2
Process for the generation of metal-containing films
David Dominique Schweinfurth, Ludwigshafen (DE); Lukas Mayr, Ludwigshafen (DE); Sinja Verena Klenk, Ludwigshafen (DE); Sabine Weiguny, Ludwigshafen (DE); Charles Hartger Winter, Detroit, MI (US); Kyle Blakeney, Detroit, MI (US); Nilanka Weerathunga Sirikkathuge, Detroit, MI (US); and Tharindu Malawara Arachchige Nimanthaka Karunaratne, Detroit, MI (US)
Filed by BASF SE, Ludwigshafen am Rhein (DE); and Wayne State University, Detroit, MI (US)
Filed on Mar. 31, 2022, as Appl. No. 17/710,178.
Application 17/710,178 is a continuation of application No. 16/954,341, granted, now 11,319,332, previously published as PCT/EP2018/075053, filed on Sep. 17, 2018.
Claims priority of provisional application 62/763,136, filed on Mar. 7, 2018.
Claims priority of provisional application 62/763,125, filed on Dec. 20, 2017.
Prior Publication US 2022/0220131 A1, Jul. 14, 2022
Int. Cl. C07F 5/06 (2006.01); C23C 16/08 (2006.01); C23C 16/20 (2006.01); C23C 16/455 (2006.01); C23C 16/12 (2006.01)
CPC C07F 5/069 (2013.01) [C07F 5/067 (2013.01); C23C 16/08 (2013.01); C23C 16/12 (2013.01); C23C 16/20 (2013.01); C23C 16/45534 (2013.01); C23C 16/45553 (2013.01)] 1 Claim
 
1. A compound of formula (Ia-2)

OG Complex Work Unit Chemistry