	US 11,654,596 B2
	Silicon carbide wafers with relaxed positive bow and related methods
Simon Bubel, Carrboro, NC (US); Matthew Donofrio, Raleigh, NC (US); John Edmond, Durham, NC (US); and Ian Currier, Wake Forest, NC (US)
Assigned to WOLFSPEED, INC., Durham, NC (US)
Filed by Wolfspeed, Inc., Durham, NC (US)
Filed on Feb. 18, 2021, as Appl. No. 17/178,532.
Application 17/178,532 is a continuation of application No. 16/784,311, filed on Feb. 7, 2020, granted, now 11,034,056.
Application 16/784,311 is a continuation of application No. 16/415,721, filed on May 17, 2019, granted, now 10,611,052.
Prior Publication US 2021/0170632 A1, Jun. 10, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. B28D 5/00 (2006.01); H01L 29/16 (2006.01)

CPC B28D 5/0011 (2013.01) [H01L 29/1608 (2013.01)]

24 Claims

OG exemplary drawing

1. A silicon carbide (SiC) wafer comprising:

a silicon face and a carbon face;

a diameter of at least 200 millimeters (mm); and

a relaxed positive bow from the silicon face.