US D1,023,959 S
Electrode for substrate processing apparatus
JeongHo Lee, Seoul (KR); JaeHyun Kim, Hwaseong-si (KR); JinHo Shin, Hwaseong-si (KR); and HyunSoo Jang, Osan-si (KR)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 11, 2021, as Appl. No. 29/782,976.
Term of patent 15 Years
LOC (14) Cl. 13 - 02
U.S. Cl. D13—121
OG exemplary drawing
 
The ornamental design for an electrode for substrate processing apparatus, as shown and described.