US 11,968,848 B2
Image sensor including nanostructure color filter
Seunghoon Han, Seoul (KR); Kwanghee Lee, Hwaseong-si (KR); Yongwan Jin, Seoul (KR); Yongsung Kim, Suwon-si (KR); Changgyun Shin, Anyang-si (KR); Jeongyub Lee, Yongin-si (KR); Amir Arbabi, Pasadena, CA (US); Andrei Faraon, Pasadena, CA (US); and Yu Horie, Pasadena, CA (US)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (US)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (US)
Filed on Oct. 15, 2020, as Appl. No. 17/071,364.
Application 17/071,364 is a continuation of application No. 15/473,767, filed on Mar. 30, 2017, granted, now 10,840,302.
Claims priority of provisional application 62/315,284, filed on Mar. 30, 2016.
Claims priority of application No. 10-2016-0149555 (KR), filed on Nov. 10, 2016.
Prior Publication US 2021/0028235 A1, Jan. 28, 2021
Int. Cl. H10K 39/32 (2023.01); H01L 27/146 (2006.01)
CPC H10K 39/32 (2023.02) [H01L 27/14621 (2013.01); H01L 27/14636 (2013.01); H01L 27/14645 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An image sensor comprising:
a first light sensor layer comprising a first light sensing cell configured to sense first light of an incident light and generate a first electrical signal based on the sensed first light;
a color filter array layer disposed on the first light sensor layer, and comprising a first color filter facing the first light sensing cell;
a second light sensor layer disposed on the color filter array layer, and configured to sense second light of the incident light and generate a second electrical signal based on the sensed second light;
a wiring layer surrounding the first light sensing cell; and
a through-channel passing through the wiring layer, and electrical connected to the second light sensor layer,
wherein the first color filter comprises:
a nanostructure comprising a plurality of structures made of a first material having a first refractive index, and a second material having a second refractive index different from the first refractive index, each of the plurality of structures arranged in a direction parallel to an upper surface of the first color filter,
a first substrate disposed on the first light sensor layer and made of a material having a third refractive index lower than the first refractive index, the plurality of structures being disposed on the first substrate, and
a second substrate disposed between the plurality of structures and the second light sensor layer and made of a material having a fourth refractive index lower than the first refractive index,
wherein the plurality of structures comprise a plurality of through-holes formed between the first substrate and the second substrate and filled with the second material, the second refractive index of the second material being lower than the first refractive index of the first material.