US 11,968,844 B2
Memory device
Chien-Min Lee, Hsinchu County (TW); Ming-Yuan Song, Hsinchu (TW); Yen-Lin Huang, Menlo Park, CA (US); Shy-Jay Lin, Hsinchu County (TW); Tung-Ying Lee, Hsinchu (TW); and Xinyu Bao, Fremont, CA (US)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Nov. 6, 2022, as Appl. No. 17/981,469.
Application 17/981,469 is a continuation of application No. 17/362,979, filed on Jun. 29, 2021, granted, now 11,538,858.
Claims priority of provisional application 63/156,956, filed on Mar. 5, 2021.
Prior Publication US 2023/0071950 A1, Mar. 9, 2023
Int. Cl. G11C 11/18 (2006.01); G11C 11/16 (2006.01); H10B 61/00 (2023.01); H10N 52/00 (2023.01); H10N 52/01 (2023.01); H10N 52/80 (2023.01)
CPC H10B 61/22 (2023.02) [G11C 11/161 (2013.01); G11C 11/1673 (2013.01); G11C 11/1675 (2013.01); G11C 11/18 (2013.01); H10N 52/00 (2023.02); H10N 52/01 (2023.02); H10N 52/80 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A memory device, comprising:
a transistor, disposed on a substrate; and
an interconnect structure, overlying the transistor, wherein the interconnect structure comprises:
a bit line extending along a first direction;
a source line extending along a second direction perpendicular to the first direction; and
a memory cell vertically disposed between the bit line and the source line, wherein the transistor is configured to control a write signal flowing between the bit line and a source of the transistor, and control a read signal flowing between the bit line and a drain of the transistor, wherein the source line is directly under the memory cell, wherein the memory cell comprises:
a selector, electrically coupled to the source of the transistor through the source line;
a magnetic tunnel junction (MTJ) structure, disposed on the selector and electrically coupled to the drain of the transistor; and
a spin orbit torque (SOT) layer, disposed between the selector and the MTJ structure, and electrically coupled to the bit line.