US 11,967,940 B2
Temperature compensating bulk acoustic wave (BAW) resonator structures, devices and systems
Dariusz Burak, Fort Collins, CO (US); Kevin J. Grannen, Thornton, CO (US); and Jack Lenell, Fort Collins, CO (US)
Assigned to Qxonix Inc., Irvine, CA (US)
Filed by QXONIX, INC., Irvine, CA (US)
Filed on Dec. 29, 2021, as Appl. No. 17/564,805.
Application 17/564,805 is a continuation of application No. PCT/US2020/043752, filed on Jul. 27, 2020.
Application PCT/US2020/043752 is a continuation of application No. 17/380,011, filed on Jul. 20, 2021, granted, now 11,863,153.
Application 17/380,011 is a continuation of application No. 16/940,172, filed on Jul. 27, 2020, granted, now 11,101,783, issued on Aug. 24, 2021.
Claims priority of provisional application 62/881,061, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,074, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,077, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,085, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,087, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,091, filed on Jul. 31, 2019.
Claims priority of provisional application 62/881,094, filed on Jul. 31, 2019.
Prior Publication US 2022/0140805 A1, May 5, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02259 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/0207 (2013.01); H03H 9/02102 (2013.01); H03H 9/0211 (2013.01); H03H 9/02157 (2013.01); H03H 9/13 (2013.01); H03H 9/131 (2013.01); H03H 9/17 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/205 (2013.01); H03H 9/54 (2013.01); H03H 9/568 (2013.01); H03H 2003/021 (2013.01); H03H 2009/02165 (2013.01)] 34 Claims
OG exemplary drawing
 
1. A bulk acoustic wave resonator comprising:
a substrate; and
a piezoelectric stack comprising first and second piezoelectric layers acoustically coupled with one another to have a piezoelectrically excitable resonance mode, in which the first piezoelectric layer has a first piezoelectric axis orientation, and the second piezoelectric layer has a second piezoelectric axis orientation that substantially opposes the first piezoelectric axis orientation of the first piezoelectric layer, and in which the first and second piezoelectric layers have respective thicknesses so that the bulk acoustic wave resonator has a main resonant frequency that is in one of a super high frequency band and an extremely high frequency band,
in which the first piezoelectric layer includes a first pair of piezoelectric sublayers, and a first temperature compensating layer.