CPC H01L 28/75 (2013.01) [H01G 4/10 (2013.01); H01L 28/91 (2013.01)] | 20 Claims |
1. A multilayer structure, comprising:
a first dielectric layer;
a second dielectric layer; and
an intermediate dielectric layer disposed between the first dielectric layer and the second dielectric layer, wherein a material of the intermediate dielectric layer is represented by a formula of AxB1-xO, wherein A includes hafnium (Hf), zirconium (Zr), lanthanum (La) or tantalum (Ta), B includes lanthanum (La), aluminum (Al) or tantalum (Ta), A is different from B, O is oxygen, and x is a number less than 1 and greater than 0.
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