CPC H01L 21/6833 (2013.01) [C23C 16/042 (2013.01); C23C 16/4586 (2013.01); C23C 16/50 (2013.01); H01J 37/32715 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/3321 (2013.01)] | 20 Claims |
1. A substrate support, comprising:
a substrate receiving surface;
a recessed portion disposed about a periphery of the substrate receiving surface, the recessed portion configured for receipt of a shadow frame;
an electrostatic chuck disposed below the substrate receiving surface; and
a plurality of compressible buttons, each compressible button disposed within a respective opening formed in the recessed portion and forming an electrical circuit with the electrostatic chuck.
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