CPC H01J 49/0463 (2013.01) [G01N 33/6848 (2013.01); G01N 33/6851 (2013.01); G02B 21/33 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 49/0004 (2013.01); H01J 49/0031 (2013.01); H01J 49/025 (2013.01); H01J 49/0418 (2013.01); H01J 49/067 (2013.01); H01J 49/105 (2013.01); H01J 49/142 (2013.01); H01J 49/161 (2013.01); H01J 49/164 (2013.01); H01J 49/40 (2013.01)] | 20 Claims |
1. An apparatus for analyzing a biological sample comprising:
a sample stage;
a source of charged particles, the source of charged particles configured to pass a beam of charged particles to a location on the sample stage; and
a first laser source and first focusing optics configured to direct a laser beam emitted by the first laser source towards the sample stage,
wherein the source of charged particles, the first laser source, and the first focusing optics are configured such that the beam of charged particles and the laser beam are directed towards opposite sides of the sample stage.
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