US 11,966,682 B2
Fast independent checker for extreme ultraviolet (EUV) routing
Diwesh Pandey, Jeevan Bhima Nagar (IN); Gustavo Enrique Tellez, Hyde Park, NY (US); and James Leland, Yorktown Heights, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Jul. 30, 2021, as Appl. No. 17/389,860.
Prior Publication US 2023/0042059 A1, Feb. 9, 2023
Int. Cl. G06F 30/398 (2020.01); G06F 30/394 (2020.01); G06F 111/04 (2020.01)
CPC G06F 30/398 (2020.01) [G06F 30/394 (2020.01); G06F 2111/04 (2020.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
creating, using at least one hardware processor, a constraint graph for a candidate routing solution, wherein each node in the constraint graph represents a position of an end of a metal shape and each arc in the constraint graph represents a design rule constraint between two of the nodes of the constraint graph;
computing, using the at least one hardware processor, a solution graph for at least a portion of the constraint graph using a shape processing algorithm;
checking, using the at least one hardware processor, the solution graph for design rule violations to generate one or more violation graphs, wherein each arc in the violation graph represents a design rule constraint between two of the nodes of the violation graph;
generating, using the at least one hardware processor, a constraint window and a selection of one or more arcs for at least one of the violation graphs; and
revising, using the at least one hardware processor, the candidate routing solution based on one or more violated design rules corresponding to at least one of the selected arcs within the constraint window.