	US 11,966,158 B2
	Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low metal contamination and/or particulate contamination, and corresponding methods
Benjamin L. Clark, Corvallis, OR (US); Dominick Smiddy, Corvallis, OR (US); Thomas J. Lamkin, Corvallis, OR (US); Mark Geniza, Corvallis, OR (US); Joseph B. Edson, Corvallis, OR (US); and Craig M. Gates, Corvallis, OR (US)
Assigned to Inpria Corporation, Corvallis, OR (US)
Filed by Inpria Corporation
Filed on Jan. 30, 2019, as Appl. No. 16/262,233.
Prior Publication US 2020/0241413 A1, Jul. 30, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/004 (2006.01); G03F 7/20 (2006.01)

CPC G03F 7/0042 (2013.01) [G03F 7/2004 (2013.01)]

10 Claims

1. A container of a composition comprising a container formed of plastic or dealkalized material and within the container a mixture of a semiconductor grade solvent and a solvated monoalkyl tin triamide (RSn(NR′₂)₃), wherein the mixture has a tin concentration from about 0.01M to about 1.4M and a concentration of non-tin metals or metalloid elements of each no more than 5 parts-per-billion (ppb) by mass.