CPC F17D 3/16 (2013.01) [B01D 46/0086 (2013.01); B01D 46/4272 (2013.01); B01D 46/46 (2013.01); G01N 33/0047 (2013.01); H01L 21/67092 (2013.01)] | 11 Claims |
1. An apparatus that utilizes high-pressure air therein, comprising:
a main body;
an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body;
a filter configured to remove oil contained in the high-pressure air flowing through the air pipe;
a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter; and
a reporting unit configured to report to an operator of the apparatus, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil.
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