US 11,946,601 B2
Apparatus utilizing high-pressure air
Tsuyoshi Kasai, Tokyo (JP); Ken Uehara, Tokyo (JP); and Satoshi Takahashi, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Aug. 25, 2021, as Appl. No. 17/445,892.
Claims priority of application No. 2020-150270 (JP), filed on Sep. 8, 2020.
Prior Publication US 2022/0074552 A1, Mar. 10, 2022
Int. Cl. G01N 33/00 (2006.01); B01D 46/00 (2022.01); B01D 46/42 (2006.01); B01D 46/46 (2006.01); F17D 3/16 (2006.01); H01L 21/67 (2006.01)
CPC F17D 3/16 (2013.01) [B01D 46/0086 (2013.01); B01D 46/4272 (2013.01); B01D 46/46 (2013.01); G01N 33/0047 (2013.01); H01L 21/67092 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An apparatus that utilizes high-pressure air therein, comprising:
a main body;
an air pipe configured to be supplied with high-pressure air from a high-pressure air supply source and supply the high-pressure air into the main body;
a filter configured to remove oil contained in the high-pressure air flowing through the air pipe;
a gas detector configured to detect an organic gas derived from oil and contained in the high-pressure air that has passed through the filter; and
a reporting unit configured to report to an operator of the apparatus, when the gas detector detects the organic gas contained in the high-pressure air, that the high-pressure air is mixed with the oil.