US 10,973,112 B2
Charged particle beam device
Ryo Kadoi, Tokyo (JP); Wen Li, Tokyo (JP); and Naoya Ishigaki, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 16/631,256
Filed by HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
PCT Filed Jul. 18, 2017, PCT No. PCT/JP2017/025930
§ 371(c)(1), (2) Date Jan. 15, 2020,
PCT Pub. No. WO2019/016857, PCT Pub. Date Jan. 24, 2019.
Prior Publication US 2020/0221566 A1, Jul. 9, 2020
Int. Cl. H05H 5/03 (2006.01); H01J 37/06 (2006.01); H01J 37/24 (2006.01); H01J 37/244 (2006.01)
CPC H05H 5/03 (2013.01) [H01J 37/06 (2013.01); H01J 37/241 (2013.01); H01J 37/244 (2013.01); H01J 2237/0473 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A charged particle beam device comprising:
a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode;
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source;
a power source control unit configured to control the acceleration power source and the extraction-electrode power source; and
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit, wherein
the power source control unit turns off the extraction-electrode power source node switch when a generation of an abnormality in the extraction-electrode power source is detected,
the extraction-electrode power source voltage detection unit is configured to detect a voltage of the extraction-electrode power source, and
the power source control unit detects the generation of the abnormality in the extraction-electrode power source using the voltage detected by the extraction-electrode power source voltage detection unit.