US D1,019,583 S
Inner tube of reaction tube for semiconductor manufacturing equipment
Atsushi Hirano, Toyama (JP)
Assigned to KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed by KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed on Nov. 28, 2022, as Appl. No. 29/861,194.
Claims priority of application No. 2022011411 D (JP), filed on May 30, 2022.
Term of patent 15 Years
LOC (14) Cl. 13 - 03
U.S. Cl. D13—182
OG exemplary drawing
 
I claim the ornamental design for an inner tube of reaction tube for semiconductor manufacturing equipment, as shown and described.